Journal article
Outlier Elimination in Rough Surface Profilometry with Focus Variation Microscopy
Publication Details
Authors: | Xu, X.; Hagemeier, S.; Lehmann, P. |
Publication year: | 2022 |
Journal: | Metrology |
Pages range : | 263-273 |
Volume number: | 2 |
Issue number: | 2 |
DOI-Link der Erstveröffentlichung: |
