Journal article
High resolution 3D NanoImprint technology: Template fabrication, application in Fabry--Pérot-filter-array-based optical nanospectrometers
Publication Details
Authors: | Wang, X.; Albrecht, A.; Mai, H.; Woidt, C.; Meinl, T.; Hornung, M.; Bartels, M.; Hillmer, H. |
Publication year: | 2013 |
Journal: | Microelectronic Engineering |
Pages range : | 44-51 |
Volume number: | 2013 |
Issue number: | 110 |
ISSN: | 0167-9317 |
DOI-Link der Erstveröffentlichung: |
Keywords
3D NanoImprint lithography, High resolution template, Optical 5MEMS6, Spectrometry
