Journal article
Nitrogen rich carbon nitride thin films deposited by hybrid PLD technique
Publication Details
Authors: | Popov, C. |
Publication year: | 2002 |
Journal: | Molecular Crystals and Liquid Crystals |
Pages range : | 207-210 |
Volume number: | 374 |
Start page: | 207 |
End page: | 210 |
ISSN: | 1542-1406 |
eISSN: | 1563-5287 |
Abstract
Highly nitrogenated CNx films were created by pulsed laser deposition (PLD), combined with radiofrequency (RF) and hollow cathode (HC) discharges. The N/C ratio higher than 1 was measured. Deposition set-up and results of optical measurement are discussed.
Highly nitrogenated CNx films were created by pulsed laser deposition (PLD), combined with radiofrequency (RF) and hollow cathode (HC) discharges. The N/C ratio higher than 1 was measured. Deposition set-up and results of optical measurement are discussed.
