Contribution in edited book
Compound Semiconductors
Publication Details
Authors: | Dharmarasu, N.; Hillmer, H. |
Editor: | Gianchandani YB, Tabata O, Zappe HP |
Publisher: | Elsevier |
Place: | Amsterdam and Oxford |
Publication year: | 2008 |
Pages range : | 25-51 |
Book title: | Comprehensive microsystems |
ISBN: | 978-0-444-52190-3 |
DOI-Link der Erstveröffentlichung: |
Keywords
cantilevers suspension, Compound semiconductors, filters, Micromachined sensors, Micromachining, Microsystems, Optical 5MEMS6, photodiodes, Self-assembled 3D micro/nanostructures, VCSELs, Wavelength-tunable devices
