Focused Ion Beam Etching of Nanometer-Size GaN/AlGaN Device Structures and their Optical Characterization by Micro-Photoluminescence/Raman Mapping - Research Information System | University of Kassel

Journal article

Focused Ion Beam Etching of Nanometer-Size GaN/AlGaN Device Structures and their Optical Characterization by Micro-Photoluminescence/Raman Mapping

Publication Details

Authors:

Kuball, M.; Benyoucef, M.; Morrissey, F.; Foxon, C.

Publication year:

1999

Journal:

MRS Online Proceedings Library

Pages range :

Art. 123

Volume number:

595

Issue number:

ISSN:

1946-4274

eISSN:

1946-4274

DOI-Link der Erstveröffentlichung:

Authors/Editors